JPH047807B2 - - Google Patents

Info

Publication number
JPH047807B2
JPH047807B2 JP59153174A JP15317484A JPH047807B2 JP H047807 B2 JPH047807 B2 JP H047807B2 JP 59153174 A JP59153174 A JP 59153174A JP 15317484 A JP15317484 A JP 15317484A JP H047807 B2 JPH047807 B2 JP H047807B2
Authority
JP
Japan
Prior art keywords
light
reflected
measurement
sensors
optical axis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59153174A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6131911A (ja
Inventor
Masahiko Mochizuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP15317484A priority Critical patent/JPS6131911A/ja
Publication of JPS6131911A publication Critical patent/JPS6131911A/ja
Publication of JPH047807B2 publication Critical patent/JPH047807B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)
JP15317484A 1984-07-25 1984-07-25 表面検査装置 Granted JPS6131911A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15317484A JPS6131911A (ja) 1984-07-25 1984-07-25 表面検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15317484A JPS6131911A (ja) 1984-07-25 1984-07-25 表面検査装置

Publications (2)

Publication Number Publication Date
JPS6131911A JPS6131911A (ja) 1986-02-14
JPH047807B2 true JPH047807B2 (en]) 1992-02-13

Family

ID=15556668

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15317484A Granted JPS6131911A (ja) 1984-07-25 1984-07-25 表面検査装置

Country Status (1)

Country Link
JP (1) JPS6131911A (en])

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57211506A (en) * 1981-06-24 1982-12-25 Hitachi Ltd Non-contact type measuring device for shape of surface
JPS5858740A (ja) * 1981-10-02 1983-04-07 Mitsubishi Electric Corp 半導体ウエハのそり測定装置

Also Published As

Publication number Publication date
JPS6131911A (ja) 1986-02-14

Similar Documents

Publication Publication Date Title
JP2913984B2 (ja) 傾斜角測定装置
US4732485A (en) Optical surface profile measuring device
JP3308230B2 (ja) 主要光学システムの対象物と光学出力ステージとの間の目標分離距離を維持する維持装置、および維持方法
JPH0820371B2 (ja) 欠陥検査装置及び欠陥検査方法
JPH063125A (ja) 光学式変位計
GB2167262A (en) Distance measurement
US5202740A (en) Method of and device for determining the position of a surface
JPS6161178B2 (en])
JPH047807B2 (en])
JPH07294231A (ja) 光学式表面粗度計
JPH056643B2 (en])
JPS6370110A (ja) 距離測定装置
JPS61223604A (ja) ギヤツプ測定装置
JPH1158053A (ja) レーザ加工装置
JPH074909A (ja) レーザセンサ装置
JPH0558483B2 (en])
KR880004297Y1 (ko) 집속제어용 광학 감지기
JPH0756444B2 (ja) 位置検出装置
JPH09210620A (ja) 面位置検出装置
JPH0315710A (ja) 変位検出装置
JPS6172214A (ja) 焦点検出装置
JPH03251708A (ja) パラボラアンテナ面形状測定装置
JPH03269311A (ja) 光ビーム位置検出装置
JPH07113610A (ja) 物体表面の光軸方向変位検出装置
JPH0323977B2 (en])